@article{paperid:1012542,
author = { -,  - and Keshmiri, Sayyed-Hossein},
title = {Comprehensive analysis of a high-Q, low motional resistance, very-high frequency MEMS resonator},
journal = {Journal of Applied Sciences},
year = {2009},
volume = {9},
number = {7},
month = {July},
issn = {1812-5654},
pages = {1285--1292},
			numpages = {7},
keywords = {Micromechanical Resonator; Motional Resistance; Quality Factor; MEMS},
}