@inproceedings{paperid:1012599,
author = {Y. Hezarjaribi and M. N. Hamidon and Keshmiri, Sayyed-Hossein and A. R. Bahadorimehr},
title = {Capacitive Pressure Sensors Based on MEMS, Operating in Harsh Environments},
booktitle = {International Conference on Semiconductor Electronics-ICSE 2008},
year = {2008},
location = {Johor Bahru},
keywords = {MEMS; Touch mode Capacitive; pressure sensor; high-temperature; polycrystalline
silicon carbide; PSG; harsh environment},
}