@inproceedings{paperid:1025585,
author = {R. Magnusson and Y. Hu and K. J. Lee and Shokooh-Saremi, Mehrdad and S. Platzer and A- K. Nebioglu},
title = {Fabrication of patterned resonance elements by nanoscale imprint method},
booktitle = {17th Connecticut Microelectronics and Optoelectronics Consortium Symposium (CMOC)},
year = {2008},
location = {Storrs, USA},
keywords = {Nanoimprint lithography},
}