@article{paperid:1029177,
author = {Kouravandbardpareh, Shahriar},
title = {Design and modeling of some sensing and actuating mechanisms for MEMS applications},
journal = {Applied Mathematical Modelling},
year = {2011},
volume = {35},
number = {10},
month = {April},
issn = {0307-904X},
pages = {5173--5181},
			numpages = {8},
keywords = {Sensing
Actuating
Bimetal
MEMS
Capacitance},
}