@inproceedings{paperid:1034252, author = {Moeenfard, Hamid and Mohammad Taghi Ahmadian and A. Farshidianfar}, title = {ANALYTICAL MODELING OF SQUEEZE FILM DAMPING IN MICROMIRRORS}, booktitle = {ASME DETC2011}, year = {2011}, location = {Washington DC, USA}, keywords = {Micromirror; Squeeze film damping; Reynolds equation; Extended Kantorovich Method}, }