@inproceedings{paperid:1038262,
author = {Joodaki, Mojtaba and Teoman Senyildiz and Guenter Kompa and Rainer Kassing and Hartmut Hillmer},
title = {Using scanning probe microscopy and nanomoter surface profiler of DEKTAK for determination of thermal stress in quasi-monolithic integration technology (QMIT)},
booktitle = {Proceeding of SPIE, vol. 4468, Engineering Thin Films with Ion Beams, Nanoscale Diagnostics, and Molecular Manufacturing},
year = {2001},
keywords = {scanning probe microscopy; DEKTAK; thermal stress; quasi-monolithic integration technology; QMIT},
}