@inproceedings{paperid:1068573, author = {RezapourJaghargh, Vahid and Mahdavishahri, َAmirmehran and Roohi, Ehsan}, title = {Investigation of Rarefied Gas Flow in Micro/Nano Cavity by Fokker Planck Approach}, booktitle = {بیست و ششمین همایش سالانه بین­ المللی انجمن مهندسان مکانیک ایران}, year = {2018}, location = {سمنان, IRAN}, keywords = {Rarefied gas; Fokker Planck approach; DSMC; Cavity}, }