%0 Conference Proceedings
%T Capacitive Pressure Sensors Based on MEMS, Operating in Harsh Environments
%A Y. Hezarjaribi
%A  M. N. Hamidon
%A  Keshmiri, Sayyed-Hossein
%A  A. R. Bahadorimehr
%J International Conference on Semiconductor Electronics-ICSE 2008
%D 2008