ASME IMECE 2012 , 2012-11-09

Title : ( CHARACTERIZATION OF STATIC BEHAVIOR OF ELECTROSTATICALLY ACTUATED MICRO TWEEZERS USING MODIFIED COUPLE STRESS THEORY )

Authors: A. Darvishian , Hamid Moeenfard , N. Ghaderi , M. Taghi Ahmadian ,

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Abstract

In this paper, static behavior and pull-in of micro tweezers is studied. The micro tweezer is modelled as two cantilever beams. Static behavior of the micro tweezer under the effect of electrostatic actuation is modelled using the Euler-Bernoulli beam theory. In order to capture size effects on the behavior of micro tweezers, modified couple stress theory is utilized. It is shown when the voltage between two electrodes increased from some specific value, micro beams adhere to each other and it is observed that the pull-in voltage predicted by the modified couple stress theory considerably differs with that of the classical theory of elasticity. Results of this paper can be used for accurate design, synthesis and optimization of micro tweezers.

Keywords

, Micro tweezer, Electrostatic force, Size dependent beam behavior, Modified couple stress theory, Pull-in.
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@inproceedings{paperid:1034181,
author = {A. Darvishian and Moeenfard, Hamid and N. Ghaderi and M. Taghi Ahmadian},
title = {CHARACTERIZATION OF STATIC BEHAVIOR OF ELECTROSTATICALLY ACTUATED MICRO TWEEZERS USING MODIFIED COUPLE STRESS THEORY},
booktitle = {ASME IMECE 2012},
year = {2012},
location = {Houston, USA},
keywords = {Micro tweezer; Electrostatic force; Size dependent beam behavior; Modified couple stress theory; Pull-in.},
}

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%0 Conference Proceedings
%T CHARACTERIZATION OF STATIC BEHAVIOR OF ELECTROSTATICALLY ACTUATED MICRO TWEEZERS USING MODIFIED COUPLE STRESS THEORY
%A A. Darvishian
%A Moeenfard, Hamid
%A N. Ghaderi
%A M. Taghi Ahmadian
%J ASME IMECE 2012
%D 2012

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