The First International Conference on MEMS and Microfabrication , 2014-02-18

Title : ( Pull-in time study of double clamped micro-electromechanical beam under the squeezed air-film effect )

Authors: hamid ghazanfar , Masoud Tahani , Amir Reza Askari ,

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Abstract

The present paper focuses on the fluid-structure interaction occurred in electrically actuated micro-switches to study the pull-in behaviour of such systems under squeeze air film effect. The Reynolds\' equation as well as a geometric non-linear Euler-Bernoulli beam model which accounts for the distributed electrostatic loading are considered simultaneously to simulate the pull-in behaviour of a micro-electromechanical beam. The resulting coupled and non-linear system of partial differential equations is solved and pull-in time is extracted using the differential quadrature method (DQM) where the time is extended through the Newmark procedure. A parametric study is also conducted to emphasize on the effects of applied voltage and surrounding pressure on pull-in time. The present results agree well with available empirical observations in the literature. The present method is relevant for numerical procedure with few times convergence and this can be used as design tools to improve switch performance in future designs.

Keywords

, Electrically actuated micro-switch, Fluid-structure interaction, Squeeze film damping, DQM
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@inproceedings{paperid:1040517,
author = {Ghazanfar, Hamid and Tahani, Masoud and Askari, Amir Reza},
title = {Pull-in time study of double clamped micro-electromechanical beam under the squeezed air-film effect},
booktitle = {The First International Conference on MEMS and Microfabrication},
year = {2014},
location = {Tehran, IRAN},
keywords = {Electrically actuated micro-switch; Fluid-structure interaction; Squeeze film damping; DQM},
}

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%0 Conference Proceedings
%T Pull-in time study of double clamped micro-electromechanical beam under the squeezed air-film effect
%A Ghazanfar, Hamid
%A Tahani, Masoud
%A Askari, Amir Reza
%J The First International Conference on MEMS and Microfabrication
%D 2014

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