The 3rd Global Conference on Materials Science and Engineering CMSE 2014 , 2014-10-20

Title : ( Size-dependent free vibrations of electrostatically pre-deformed functionally graded micro-cantilevers )

Authors: Masoud Tahani , Romesh Batra , Amir Reza Askari ,

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Abstract

Size-dependent free vibration analysis of cantilever-type resonant micro-sensors made of non-homogeneous functionally graded materials with two material phases is the objective of the present paper. For this aim, the modified couple stress theory together with the Euler-Bernoulli beam model is considered, and the size-dependent equation of motion which accounts for the non-linear and distributed electrostatic force is derived using the Hamilton's principle. The natural frequencies of the system are extracted using the Galerkin weighted residual method. It is found that the fundamental frequency of the system is decreased with an increase of applied voltage and becomes zero when the input voltage reaches the pull-in voltage of the system. The findings of the present paper are compared and validated by available results in the literature and excellent agreements between them are observed.

Keywords

, MEMS, Micro-cantilevers, Functionally graded materials, Modified couple stress theory, Galerkin method, Natural frequencies, Pull-in voltage.
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@inproceedings{paperid:1043194,
author = {Tahani, Masoud and Romesh Batra and Askari, Amir Reza},
title = {Size-dependent free vibrations of electrostatically pre-deformed functionally graded micro-cantilevers},
booktitle = {The 3rd Global Conference on Materials Science and Engineering CMSE 2014},
year = {2014},
location = {Shanghai},
keywords = {MEMS; Micro-cantilevers; Functionally graded materials; Modified couple stress theory; Galerkin method; Natural frequencies; Pull-in voltage.},
}

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%0 Conference Proceedings
%T Size-dependent free vibrations of electrostatically pre-deformed functionally graded micro-cantilevers
%A Tahani, Masoud
%A Romesh Batra
%A Askari, Amir Reza
%J The 3rd Global Conference on Materials Science and Engineering CMSE 2014
%D 2014

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