@article{paperid:1012514,
author = {H.Nabovati and Mafinezhad, Khlil and Keshmiri, Sayyed-Hossein and A.Nabovati},
title = {Design and Simulation of an Oblique Suspender MEMS Variable Capacitor},
journal = {Scientia Iranica},
year = {2006},
volume = {13},
number = {1},
month = {January},
issn = {1026-3098},
pages = {60--66},
			numpages = {6},
keywords = {Design and Simulation of an Oblique Suspender MEMS Variable Capacitor},
}