@article{paperid:1012540,
author = {H.Nabovati and Mafinezhad, Khlil and A.Nabovati and Keshmiri, Sayyed-Hossein},
title = {Comprehensive Electromechanical Analysis of MEMS Variable Gap Capacitors},
journal = {مهندسی برق و الکترونیک ایران},
year = {2008},
volume = {4},
number = {2},
month = {February},
issn = {2676-5810},
pages = {3--9},
			numpages = {6},
keywords = {MEMS; Variable capacitors; Electromechanical modeling},
}