@article{paperid:1014345, author = {Roodbari Shahmiri, Mandana and Rezaee Roknabadi, Mahmood and Shahtahmassebi, Nasser}, title = {Structural Properties of Ultrathin Al2O3 Films on Si}, journal = {World Applied Sciences Journal}, year = {2009}, volume = {7}, number = {7}, month = {July}, issn = {1818-4952}, pages = {12--14}, numpages = {2}, keywords = {Thin film % Nano transistor % Nano structure % Al O and NMR % XRD techniques}, }