@inproceedings{paperid:1020614, author = {Mohammadzadeh, Alireza and Roohi, Ehsan and Niazmand, Hamid}, title = {Detailed Investigation of Rarefied Flow in Micro/Nano Lid-driven Cavities Using DSMC}, booktitle = {19th Annual Conference on Mechanical Engineering-ISME2011}, year = {2011}, location = {IRAN}, keywords = {DSMC; micro cavity; rarefied flow; Boltzmann equation}, }