@article{paperid:1033609, author = {Akbarzadeh Tootoonchi, Alireza and Kouravandbardpareh, Shahriar and Moetakef Imani, Behnam}, title = {Robust Design of a Bimetallic Micro Thermal Sensor Using Taguchi Method}, journal = {Journal of Optimization Theory and Applications}, year = {2013}, volume = {157}, number = {1}, month = {April}, issn = {0022-3239}, pages = {188--198}, numpages = {10}, keywords = {MEMS; thermal sensor; optimization; Taguchi; ANOVA}, }