@article{paperid:1033928,
author = {Moeenfard, Hamid and Mohammad Taghi Ahmadian},
title = {The influence of vertical deflection of the supports in modeling squeeze film damping in torsional micromirrors},
journal = {Microelectronics Journal},
year = {2012},
volume = {43},
number = {8},
month = {May},
issn = {1879-2391},
pages = {530--536},
			numpages = {6},
keywords = {Micromirror; Squeezed film damping; Reynolds equation; Bending effect},
}