@article{paperid:1033932, author = {Moeenfard, Hamid and Mohammad Taghi Ahmadian}, title = {Analytical modeling of bending effect on the torsional response of electrostatically actuated micromirrors}, journal = {Optik}, year = {2012}, volume = {124}, number = {12}, month = {April}, issn = {0030-4026}, pages = {1278--1286}, numpages = {8}, keywords = {Micromirror; Bending effect; HPM; Perturbation method}, }