@inproceedings{paperid:1034155,
author = {A. Darvishian and Moeenfard, Hamid and M. Taghi Ahmadian},
title = {Static Pull-in Analysis of Micro-Cantilevers in Wet Etching Fabrication Process},
booktitle = {ASME},
year = {2012},
location = {Houston, USA},
keywords = {Micro-Cantilevers; Capillary Force; Wet
Etching Fabrication Process; Pull-in},
}