@inproceedings{paperid:1034186,
author = {Moeenfard, Hamid and F. Kaji and M. Taghi Ahmadian},
title = {COUPLED BENDING AND TORSION EFFECTS ON THE SQUEEZED FILM AIR DAMPING IN TORSIONAL MICROMIRRORS},
booktitle = {ASME IMECE 2012},
year = {2012},
location = {Houston, USA},
keywords = {COUPLED BENDING AND TORSION EFFECTS; SQUEEZED FILM AIR DAMPING; TORSIONAL MICROMIRRORS},
}