@inproceedings{paperid:1034250, author = {A. Darvishian and Moeenfard, Hamid and H. Zohoor and M. Taghi Ahmadian}, title = {CLOSED FORM SOLUTIONS FOR THE PROBLEM OF STATICAL BEHAVIOR OF NANO/MICROMIRRORS UNDER THE EFFECT OF CAPILLARY FORCE AND VAN DER WAALS FORCE}, booktitle = {ASME IMECE 2011}, year = {2011}, location = {Colorado, USA}, keywords = {Nano/micromirror; capillary force; vdW force; HPM.}, }