@inproceedings{paperid:1034252,
author = {},
title = {ANALYTICAL MODELING OF SQUEEZE FILM DAMPING IN MICROMIRRORS},
booktitle = {ASME DETC2011},
year = {2011},
location = {Washington DC, USA},
keywords = {Micromirror; Squeeze film damping; Reynolds equation;
Extended Kantorovich Method},
}