@inproceedings{paperid:1034254, author = {Moeenfard, Hamid and A. Darvishian and M. Taghi Ahmadian}, title = {CLOSED FORM SOLUTIONS FOR THE STATICAL BEHAVIOR OF MICROMIRRORS UNDER CAPILLARY FORCES}, booktitle = {ASME IMECE 2011}, year = {2011}, location = {Colorado, USA}, keywords = {Micromirror; Capillary force; Instability; Pull-in; HPM}, }