@inproceedings{paperid:1037035,
author = {Joodaki, Mojtaba and H. Hillmer},
title = {Technological requirements for a self-aligned lateral SiGe HBT with the SiGe layer formed by Ge ion implantation in Si including theoretical performance},
booktitle = {8th International Conference on Solid-State and Integrated Circuit Technology, 2006. ICSICT \'06.},
year = {2006},
location = {Shanghai},
keywords = {lateral SiGe HBT; the SiGe layer},
}