@inproceedings{paperid:1038256,
author = {G. Kompa and W. Wasige and Joodaki, Mojtaba},
title = {Quasi-Monolithic Hybrid Technology Based on Si Micromachining and Low-Temperature Thin-Film Processing},
booktitle = {VDE world micro-technologies congress; Micro.tec 2000 applications - trends - visions},
year = {2000},
location = {Hanover, Germany, GERMANY},
keywords = {Quasi-Monolithic Hybrid Technology; Micromachining; Thin-Film Processing},
}