@inproceedings{paperid:1038275,
author = {جودکی, مجتبی and Heydari Z},
title = {Simulation of Phase Shifting Mask Lithography},
booktitle = {The First Iranian University Student Conference on Electrical Engineering},
year = {1998},
location = {ايران},
keywords = {Simulation of Phase Shifting Mask Lithography},
}