@inproceedings{paperid:1040234,
author = {Mohsenzadeh, Arman and Tahani, Masoud and Daqiqeh Rezaei, Soroosh},
title = {Material and Geometrical Characteristics Investigation of Micro-beam on Pull-in Voltage Using FEM and Taguchi DOE},
booktitle = {The First International Conference on MEMS and Microfabrication},
year = {2014},
location = {Tehran, IRAN},
keywords = {Micro-beam; Pull-in voltage; COMSOL Multiphysics; FEM; Taguchi DOE},
}