@inproceedings{paperid:1040235, author = {Mohsenzadeh, Arman and Tahani, Masoud and Daqiqeh Rezaei, Soroosh}, title = {Investigation of length and initial gap variation on pull-in voltage of multilayered micro-beam}, booktitle = {The First International Conference on MEMS and Microfabrication}, year = {2014}, location = {Tehran, IRAN}, keywords = {Multilayered micro-beam; Pull-in voltage; COMSOL Multiphysics; FEM}, }