@inproceedings{paperid:1040692,
author = {Roohi, Ehsan and Yazdanpanah Moghadam, Ehsan and Abolfazli Esfahani, Javad},
title = {Influence of molecular structure on thermal behavior in vacuum packaged MEMS/NEMS using DSMC},
booktitle = {5thInternational Conference on Nanostructures (ICNS5)},
year = {2014},
location = {کیش, IRAN},
keywords = {Heat flux; Rarefied flow; DSMC; Micro/Nano thermal cavity; MEMS/NEMS},
}