@inproceedings{paperid:1043194, author = {Tahani, Masoud and Romesh Batra and Askari, Amir Reza}, title = {Size-dependent free vibrations of electrostatically pre-deformed functionally graded micro-cantilevers}, booktitle = {The 3rd Global Conference on Materials Science and Engineering CMSE 2014}, year = {2014}, location = {Shanghai}, keywords = {MEMS; Micro-cantilevers; Functionally graded materials; Modified couple stress theory; Galerkin method; Natural frequencies; Pull-in voltage.}, }