@article{paperid:1044133, author = {Moeenfard, Hamid}, title = {ANALYTICAL MODELING OF SQUEEZE FILM DAMPING IN DUAL AXIS TORSION MICROACTUATORS}, journal = {Surface Review and Letters}, year = {2014}, volume = {22}, number = {1}, month = {October}, issn = {0218-625X}, pages = {1550006--8}, numpages = {-1549998}, keywords = {Dual axis torsion microactuator; squeeze ¯lm damping; Reynolds equation; analytical modeling; damping torque}, }