@article{paperid:1044509,
author = {Zeynali, Iman and Abolfazli Esfahani, Javad and Moeenfard, Hamid},
title = {Entropy generation analysis of squeeze film air damping in torsional micromirrors},
journal = {Optik},
year = {2015},
volume = {126},
number = {1},
month = {January},
issn = {0030-4026},
pages = {28--37},
			numpages = {9},
keywords = {Micromirror; Squeeze  film  air  damping; Entropy  generation; MEMS},
}