@article{paperid:1047320, author = {Tahani, Masoud and Askari, Amir Reza and Mohandes, Yousof and Hassani, Behrooz}, title = {Size-dependent free vibration analysis of electrostatically pre-deformed rectangular micro-plates based on the modified couple stress theory}, journal = {International Journal of Mechanical Sciences}, year = {2015}, volume = {94-95}, number = {1}, month = {June}, issn = {0020-7403}, pages = {185--198}, numpages = {13}, keywords = {MEMS; Electrostatically pre-deformed rectangular micro-plates; Pull-in instability; Free vibration characteristics; Modified couple stress theory}, }