@inproceedings{paperid:1052988, author = {Askari, Amir Reza and Tahani, Masoud}, title = {The Influence of Couple Stress Components and Electrostatic Actuation on Free Vibration Characteristics of Thin Micro-Plates}, booktitle = {7th International Conference on Mechanical, Industrial, and Manufacturing Technologies - MIMT 2016}, year = {2016}, location = {Cape Town, south africa}, keywords = {MEMS; Size effect; Modified couple stress theory; Free vibration}, }