@inproceedings{paperid:1066273, author = {Khadembashi, Mohammad and Moeenfard, Hamid and A. H. Ghasemi}, title = {Deflection Control of Electrostatically Actuated Micro Cantilevers via Fuzzy Controller}, booktitle = {Proceedings of the ASME 2016 Dynamic Systems and Control Conference}, year = {2016}, location = {Minneapolis, USA}, keywords = {Pull-in Instability; Cantilever Microbeam; Electrostatic Actuation; Fuzzy Logic Control; Supervisory Control}, }