@article{paperid:1081505,
author = {Kordi, Mahdi and Vaziri, Seyyed Mohammad Reza and Armin, Fahimeh and Joodaki, Mojtaba},
title = {An approach for one dimensional periodic arbitrary lithography based on Fourier series},
journal = {Engineering Science and Technology, an International Journal},
year = {2020},
volume = {24},
number = {2},
month = {October},
issn = {2215-0986},
pages = {343--347},
			numpages = {4},
keywords = {Interference lithography; Fourier series expansion; Arbitrary patterns},
}