@article{paperid:1086308,
author = {Chih-Chieh Hsu and Wun-Ciang Jhang and Yu-Sheng Chien and Chao-Wen Cheng and Joodaki, Mojtaba},
title = {High on–off current ratio titanium oxynitride write-once-read-many-times memory},
journal = {Semiconductor Science and Technology},
year = {2021},
volume = {36},
number = {6},
month = {June},
issn = {0268-1242},
pages = {6--6},
			numpages = {0},
keywords = {Titanium oxynitride; nitridation; resistive memory; oxide semiconductor; write-once-read-many-times},
}