@inproceedings{paperid:199, author = {Abolbashari, Mohammad Hossein and Bagheri, Mahdi}, title = {Design tools for a micromembrane based on a finite element method and a finite difference method simulation}, booktitle = {4th International Conference in Materials Structure and Micromechanics of Fracture, MSMF-4}, year = {2004}, location = {Brno}, keywords = {MEMS; FEM; FDM; DR; Micromembrane}, }