%0 Journal Article
%T Design and Simulation of an Oblique Suspender MEMS Variable Capacitor
%A H.Nabovati
%A  Mafinezhad, Khlil
%A  Keshmiri, Sayyed-Hossein
%A  A.Nabovati
%J Scientia Iranica
%@ 1026-3098
%D 2006