%0 Conference Proceedings %T DETAILED INVESTIGATION OF THERMAL AND HYDRODYNAMIC FLOW BEHAVIOUR IN MICRO/NANO CAVITY USING DSMC AND NSF EQUATIONS %A Mohammadzadeh, Alireza %A Roohi, Ehsan %A Niazmand, Hamid %J 9th International Conference on Nanochannels, Microchannels and Minichannels %D 2011