%0 Conference Proceedings %T Fabrication of patterned resonance elements by nanoscale imprint method %A R. Magnusson %A Y. Hu %A K. J. Lee %A Shokooh-Saremi, Mehrdad %A S. Platzer %A A- K. Nebioglu %J 17th Connecticut Microelectronics and Optoelectronics Consortium Symposium (CMOC) %D 2008