%0 Journal Article
%T Characterization of the static behavior of micromirrors under the effect of capillary force, an analytical approach
%A Moeenfard, Hamid
%A  Ali Darvishian
%A  Hassan Zohoor
%A  Mohammad Taghi Ahmadian
%J Proceedings of the Institution of Mechanical Engineers - Part C
%@ 0954-4062
%D 2011