%0 Conference Proceedings
%T CLOSED FORM SOLUTIONS FOR THE PROBLEM OF STATICAL BEHAVIOR OF NANO/MICROMIRRORS UNDER THE EFFECT OF CAPILLARY FORCE AND VAN DER WAALS FORCE
%A A. Darvishian
%A  Moeenfard, Hamid
%A  H. Zohoor
%A  M. Taghi Ahmadian
%J ASME IMECE 2011
%D 2011