%0 Conference Proceedings %T A COUPLED MODEL BETWEEN TORSION AND BENDING IN NANO/MICROMIRRORS UNDER THE COMBINED EFFECT OF VAN DER WAALS FORCE AND CAPILLARY FORCE %A Moeenfard, Hamid %A A. Darvishian %A M. Taghi Ahmadian %J ASME IMECE 2011 %D 2011