%0 Conference Proceedings
%T Using scanning probe microscopy and nanomoter surface profiler of DEKTAK for determination of thermal stress in quasi-monolithic integration technology (QMIT)
%A Joodaki, Mojtaba
%A  Teoman Senyildiz
%A  Guenter Kompa
%A  Rainer Kassing
%A  Hartmut Hillmer
%J Proceeding of SPIE, vol. 4468, Engineering Thin Films with Ion Beams, Nanoscale Diagnostics, and Molecular Manufacturing
%D 2001