%0 Conference Proceedings
%T Material and Geometrical Characteristics Investigation of Micro-beam on Pull-in Voltage Using FEM and Taguchi DOE
%A Mohsenzadeh, Arman
%A  Tahani, Masoud
%A  Daqiqeh Rezaei, Soroosh
%J The First International Conference on MEMS and Microfabrication
%D 2014