%0 Conference Proceedings
%T Influence of molecular structure on thermal behavior in vacuum packaged MEMS/NEMS using DSMC
%A Roohi, Ehsan
%A  Yazdanpanah Moghadam, Ehsan
%A  Abolfazli Esfahani, Javad
%J 5thInternational Conference on Nanostructures (ICNS5)
%D 2014