%0 Conference Proceedings %T KNUDSEN PUMP WITH SPECULAR AND DIFFUSE WALLS %A T. Baier %A S. Hardt %A Shahabi, Vahid %A Roohi, Ehsan %J 5th European Conference on Microfluidics – μFlu18 3rd European Conference on Non-Equilibrium Gas Flows – NEGF18 %D 2018