%0 Journal Article
%T An approach for one dimensional periodic arbitrary lithography based on Fourier series
%A Kordi, Mahdi
%A  Vaziri, Seyyed Mohammad Reza
%A  Armin, Fahimeh
%A  Joodaki, Mojtaba
%J Engineering Science and Technology, an International Journal
%@ 2215-0986
%D 2020