In the current study we performed a DSMC investigation to study the non-equilibrium effects on monatomic and diatomic rarefied flows in micro/nano lid-driven cavity. Our DSMC solver is parallel and benefits from a variable time step algorithm. The results of our simulation showed that growing rarefaction effects increase the maximum temperature of the cavity flow. As inter-molecular rate of collision diminishes in the non-equilibrium regime, molecules manage to conserve their obtained energy from diffused surfaces, consequently, the flow temperature increases. We also investigate the non-equilibrium effects on the shear stress profile in the micro/nano cavity. Although increasing the Knudsen number decreases flow shear stress, the non-dimensional shear stress, which shows the molecular potential for performing collision in the rarefied flow, increases.

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